SinguLYS Single-Axis Air Bearing Stages for PV Manufacturing
Resource from: CBCC Likes:2952
Jul 05,2010
Newport Corporation, a worldwide leader in laser and photonic solutions, announces the new SinguLYS family of single-axis air bearing stages.
The new stage and bridge configurations combine high performance with modularity, making them ideal for single axis, split XY, and gantry applications.
Newport will present the high precision stage family during SEMICON West, 13-15 July, 2010, at San Francisco’s Moscone Center, in South Hall booth #1807. The SinguLYS S-370 stage is manufactured from silicon carbide (SiC) ceramic components, similar to Newport’s popular DynamYX and HybrYX stage product families. The body’s extremely rigid and compact footprint with 3-point mounting allows this stage to be used in tight spaces typically reserved for mechanical bearing designs without the need for large, lapped mounting surfaces to maintain precise trajectory. The lightweight carriage features integrated pressure-vacuum air bearings which are guided by a precisely-lapped SiC body.
Newport’s new high precision stage is ideal for tasks with very high duty-cycles that require low angular deviation, tight velocity regulation, and high cleanliness standards. The SinguLYS B-1200 air bearing bridge features a proprietary ceramic beam that is 3 times lighter than steel and offers triple the stiffness of granite. When used to replace a steel or granite-based design in an existing or next-generation tool, the properties of the B-1200 can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign. The lightweight and rigid pressure-vacuum air bearing carriage accommodates high (10kg) cantilevered payloads with 2.5G acceleration and, unlike stages using mechanical bearings, minimizes contamination to the substrate below. Applications for Newport’s B-1200 include Gen 8-11 flat panel display inspection, thin-film photovoltaic scribing, and wafer processing.
()
【CBCC News Statement】
1.The news above mentioned with detailed source are from internet.We are trying our best to assure they are accurate ,timely and safe so as to let bearing users and sellers read more related info.However, it doesn't mean we agree with any point of view referred in above contents and we are not responsible for the authenticity. If you want to publish the news,please note the source and you will be legally responsible for the news published.
2.All news edited and translated by us are specially noted the source"CBCC".
3.For investors,please be cautious for all news.We don't bear any damage brought by late and inaccurate news.
4.If the news we published involves copyright of yours,just let us know.
BRIEF INTRODUCTION
Cnbearing is the No.1 bearing inquiry system and information service in China, dedicated to helping all bearing users and sellers throughout the world.
Cnbearing is supported by China National Bearing Industry Association, whose operation online is charged by China Bearing Unisun Tech. Co., Ltd.
China Bearing Unisun Tech. Co., Ltd owns all the rights. Since 2000, over 3,000 companies have been registered and enjoyed the company' s complete skillful service, which ranking many aspects in bearing industry at home and abroad with the most authority practical devices in China.
