Compact, Planar XY Air Bearing Stage From PI Provides Vibrationless High-Precision Motion
Resource from: Michigan Technology News Likes:164
Sep 06,2015
September 2015, Auburn, MA – Nanopositioning specialist PI (Physik Instrumente) L.P., a leader and solution provider in motion control and positioning components and systems, recently released the new A-311 PIglide IS Series compact, planar air bearing stage, designed to deliver extremely precise and vibration-free motion. Planar scanning stages are ideal for wafer inspection, laser marking, optical metrology and other precision motion applications.
Air Bearings vs. Mechanical Bearings
Air bearings replace mechanical contact by a thin air film. The fully preloaded air bearings in the A-311 PIglide IS provide frictionless motion, resulting in negligible hysteresis or reversal error, and zero-wear of mechanical components. Due to the air bearing’s surface averaging effect, pitch/yaw/roll and straightness/flatness are significantly better than with conventional mechanical bearings, motion is vibration-free, and velocity can be controlled at very high constancy.
Planar Stages vs. Stacked XY Stages
The compact, single base plate design provides a lower profile compared to stacked XY stages and makes integration in tight spaces easy. In addition, error-causing bending moments introduced in stacked stages when the load on the top stage moves off-center are not an issue with planar stages. By eliminating the height and overhung loads of an XY stack design, the A-311 PIglide IS stage achieves 0.1 µm/inch straightness and flatness and roll/pitch/yaw errors of 1 to 2 arc-seconds.
Watch Video:
https://www.youtube.com/embed/_0frYXPpLEw?rel=0
Linear Motors and Encoders for High Speed and Acceleration
Smooth motion with no cogging or attractive forces is provided by ironless linear motors; position information down to 1nm resolution comes from integrated linear encoders. The powerful linear motors reach velocities up to 1m/sec and acceleration to 1g, a prerequisite for fast scanning and automation applications.
Specifications, Datasheet, More Information:
http://www.pi-usa.us/products/Air_Bearing_Stages/index.php?onl_prweb#XY_Planar
Applications of the Cleanroom Compatible IS Planar Stage
Wafer inspection and scribing applications, microscopy, scanning.
Features & Advantages
Low profile, high precision
Optical linear encoders to 1 nanometer
Travels up to 200mm x 200mm
Load to 15kg max
Velocity to 1m/sec, Acceleration to 1g
(Michigan Technology News)
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1.The news above mentioned with detailed source are from internet.We are trying our best to assure they are accurate ,timely and safe so as to let bearing users and sellers read more related info.However, it doesn't mean we agree with any point of view referred in above contents and we are not responsible for the authenticity. If you want to publish the news,please note the source and you will be legally responsible for the news published.
2.All news edited and translated by us are specially noted the source"CBCC".
3.For investors,please be cautious for all news.We don't bear any damage brought by late and inaccurate news.
4.If the news we published involves copyright of yours,just let us know.
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